MICROWAVE PLASMA PROCESSING APPARATUS,申请号JP19830212347-传众专利搜索

MICROWAVE PLASMA PROCESSING APPARATUS

申请公布号：JPS60105234(A)

申请号：JP19830212347

申请日期：1983.11.14

申请公布日期：1985.06.10

申请人：

HITACHI SEISAKUSHO KK

发明人：YAMAMOTO NORIAKI;SHIBATA FUMIO;KANAI NORIO

分类号：H01L21/302;H01L21/3065;(IPC1-7):H01L21/302

主分类号：H01L21/302

摘要：PURPOSE:To form a small-size device and makes small the exclusively occupied area by making small external sizes of coil for generating maximum field. CONSTITUTION:A coil 50a' of generating maximum magnetic field among the coils 50a'-50c' is arranged around a part of waveguide 40' not including a discharge tube 30. A size of a part of waveguide 40' not including the discharge tube 30, namely a part where the microwave generated by the microwave generator 60 and is transmitted through a microwave transmission means 70 passes therethrough in smaller than the size of the part including the discharge tube 30. An internal size of coil 50a' can be reduced as much as reduction in size of waveguide 40' than the internalsize of coils 50b', 50c'. Therefore, an external size of coil 50a' is also reduced. In case distribution of magnetic field required is considered, the external sizes of coils 50b', 50c' can be made smaller than the external size of coil 50a'. In this case, however, the external size of such coil is set equal to that of the coil 50a' from the point of view of appearance thereof.