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LITHOGRAFIEGERAET ZUR ERZEUGUNG VON MIKROSTRUKTUREN

申请公布号:DE3504714(A1)

申请号:DE19853504714

申请日期:1985.02.12

申请公布日期:1986.08.14

申请人:
SIEMENS AG

发明人:LISCHKE,BURKHARD,PROF.DR.

分类号:H01J37/141;H01J37/09;H01J37/10;H01J37/30;H01J37/305;H01J37/317;H01L21/027;(IPC1-7):H01J37/317;H01J37/063;H01J37/20;H01L21/26;G03F7/20

主分类号:H01J37/141

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