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METHOD FOR AUTOMATION OF MANUFACTURING PROCESS OF INTEGRATED CIRCUIT

申请公布号:JPS60247939(A)

申请号:JP19840104028

申请日期:1984.05.23

申请公布日期:1985.12.07

申请人:
TOSHIBA KK

发明人:KANEKO YOSHIO

分类号:H01L21/50

主分类号:H01L21/50

摘要:PURPOSE:To enable to perform the desired work automatically by a method wherein an identifying information in accordance with the kind of an integrated circuit pellet is given to the pellet, and said identifying information electrically judged when a manufacturing process is performed. CONSTITUTION:A resistor R having the resistance value established in accordance with the identifying information of a pellet is bult-in in an IC pellert 10 separately from an ordinary internal logic circuit 11, and a means is provided in such a manner that the resistance value of the resistor R can be detected electrically from outside. As a result, the processes which are necessary for the pellet such as a die-sorting test, a final test, a stamping, a packing and the like can be automatically performed by electrically judging the above-mentioned identifying information.

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