DRY ETCHING PROCESS USING PLASMA

申请公布号：IE48605(B1)

申请号：IE19790001447

申请日期：1979.08.08

申请公布日期：1985.03.20

申请人：

WESTERN ELECTRIC COMPANY INCORPORATED

分类号：H01L21/302;C23F4/00;H01L21/02;H01L21/3065;H01L21/3213;(IPC1-7):C09K13/00;C23F1/00

主分类号：H01L21/302

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