TESTING SYSTEM FOR SEMICONDUCTOR DEVICE,申请号JP19810101941-传众专利搜索

TESTING SYSTEM FOR SEMICONDUCTOR DEVICE

申请公布号：JPS584940(A)

申请号：JP19810101941

申请日期：1981.06.30

申请公布日期：1983.01.12

申请人：

YAMAGATA NIPPON DENKI KK

发明人：SUGAWARA AKIRA

分类号：G01R31/26;H01L21/66

主分类号：G01R31/26

摘要：PURPOSE:To enable a real time check of a semiconductor device testing system for reliability by a method wherein the testing system is constituted of a characteristics testing unit, a detected faults counting means, and a means judging if counter registration stands at a prescribed limit or more. CONSTITUTION:A probing unit 1, an LSI tester 2, and a peripheral equipment 3 constitute a semiconductor device testing system. Housed in a tester 2 are ten- odds faulty products counters 4 the figures therein increase following a prescribed program upon receiving information as to failure to pass the test. The counters are monitored by a detecting circuit 5 that, when the quantities registered in the counters 4 reach a prescribed limit, stops the tester 2, a programming unit 1, and generates alarm signal 6. Thus, erroneous measurement caused by the malfunction of the system is thus kept at the minimum and the yield of acceptable pellets in the wafers is enhanced.