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Single gas flow elevated pressure reactor
申请公布号：US4351805(A)
申请号：US19810251591
申请日期：1981.04.06
申请公布日期：1982.09.28
发明人：REISMAN, ARNOLD;BERKENBLIT, MELVIN
分类号：H01L21/22;C23C16/455;C30B31/10;C30B31/16;C30B33/00;H01L21/31;H01L21/324;(IPC1-7):F28D21/00
主分类号：H01L21/22
摘要：An elevated pressure reactor apparatus for oxidizing or annealing specimens of the type including a reaction tube for containing the specimen surrounded by a heating furnace and enclosed in a pressure chamber, the apparatus incorporating a unique single gas flow feature, an improved multi-element furnace structure, a retrograde closure for the reaction tube to prevent gas flow back from the pressure chamber, a magnetically connected driving mechanism for a specimen support boat, and concentric gas entrance and exit tubes wherein exiting gas pre-heats the entering gas.
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