METHOD AND APPARATUS FOR TESTING SURFACE ROUGHNESS
申请公布号:CA1129228(A)
申请号:CA19790334201
申请日期:1979.08.21
申请公布日期:1982.08.10
发明人:MILANA, EMILIO
分类号:G01B11/30;G01B21/30;(IPC1-7):01B11/30
主分类号:G01B11/30
摘要:<p>Surface roughness is tested by an optical probing method which involves scanning a beam of light from a laser over a specimen workpiece via a semi-reflecting mirror and a cylindrical lens and detecting the specular component of the light reflected back through the lens and the semi-reflecting mirror to a photomultiplier the output from which is fed to an electronic processor circuit which derive a numerical valve representing the mean intensity of the reflected radiation. A workpiece to be tested is then substituted for the specimen workpiece and a new numerical valve derived. The two numerical values are compared, as by division or subtraction to obtain an output signal representing the relative surface roughness of the workpiece under test with respect to that of the specimen.</p>
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