TARGET OF IMAGE PICKKUP TUBE
申请公布号:JPS5650035(A)
申请号:JP19790125901
申请日期:1979.09.28
申请公布日期:1981.05.07
发明人:USUI SETSUO;SAWADA AKASHI
分类号:H01B5/14;H01J29/45;H01L31/08;H05K1/09;(IPC1-7):01J29/45
主分类号:H01B5/14
摘要:PURPOSE:To facilitate manufacture of a target and improve sensitivity, residual image characteristic, and baking characteristic by coating the photoconductive film consisting of the noncrystalline silicon layer in which a slight amount of acceptor impurities are doped, onto a light transmitting electrode. CONSTITUTION:Onto the inner surface of a light transmitting substratum, for example of a glass face plate 3, a transparent electrode 8 is coated which consists of the light transmitting electric conductive layer such as SnO2, (In1-XSnX)2O3, or noncrystalline silicon layer having low specific resistance. Onto the electrode 8, the noncrystalline silicon layer having low specific resistance in which a little amount of acceptor impurities are doped is coated as photoconductive film 9. Onto the photoconductive film 9, an electron beam landing layer 10 is formed.
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