SEMICONDUCTOR LASER
申请公布号:JPS55154792(A)
申请号:JP19790062175
申请日期:1979.05.22
申请公布日期:1980.12.02
发明人:RANGU HIROYOSHI
分类号:H01S5/00;H01S5/223
主分类号:H01S5/00
摘要:PURPOSE:To obtain stable lateral mode laser by epitaxially growing a light oozing layer having larger refractive index than the clad layer formed hereinafter on a semiconductor substrate, perforating a groove reaching the substrate thereat and laminating first and second clad layers via an active layer on the entire surface. CONSTITUTION:When a P-type In1-xGaxAsyP1-y layer 13 is epitaxially grown to become a light oozing layer on an N-type InP substrate 11, the refractive index of the layer 13 is so selected as to be larger than that of first clad layer 14 of N-type InP formed thereon. Then, the layer 13 is etched selectively in stripe state to form a groove 12 inserted into the surface of the substrate 11. Thereafter, there are epitaxially grown an N-type InP first clad layer 14, an N-type or a P-type active layer 15, a P-type InP second clad layer 16 on the entire surface including the groove 12, a P-type layer 17 for easily forming an electrode on the layer 16, with a negative electrodes mounted on the back surface of the substrate 11 or positive electrode on the layer 17.