PRODUCTION OF COLOR FILTER FOR SINGLE TUBE COLOR IMAGE PICKUP TUBE,申请号JP19780096850-传众专利搜索

PRODUCTION OF COLOR FILTER FOR SINGLE TUBE COLOR IMAGE PICKUP TUBE

申请公布号：JPS5525026(A)

申请号：JP19780096850

申请日期：1978.08.09

申请公布日期：1980.02.22

申请人：

AKAI ELECTRIC

发明人：URINO YOSHITERU;SATOU YOSHIO

分类号：G02B5/20;H01L27/14;H04N9/07

主分类号：G02B5/20

摘要：<p>PURPOSE:To reduce the number of steps, improve yield and improve working accuracy by providing the specific protecting film on the first color filter at the time of manufacturing the 3 color filter obtaining the third color from the two color filter with inorganic material. CONSTITUTION:After the dichroic film 2M of magenta M is evaporated on a face plate 1, the protecting film 3 of material (SiO2, etc.) of a low refractive index which does not largely change spectral sensitivity characteristics is provided thereon. Next, photo resist 4 is coated and is developed, after which the film 2M other than the certain portions of the resist 4 is removed through ion etching. Next, the photo resist 4 on the film 2M is removed through plasma etching. Further, cyan is evaporated and a dichroic film 5C is deposited and formed over the entire surface, on which photo resist 4A is coated and developed, thence the exposed film 5C part is ion-etched, followed by plasma etching to remove the resist 4A, whereby the 3 color filter M + C B(blue) is obtained. The pitch of the stripes may be made around 10mum.</p>