Photoresist stripper with dodecylsulfonic acid and chlorinated solvents,申请号US19780928094-传众专利搜索

Photoresist stripper with dodecylsulfonic acid and chlorinated solvents

申请公布号：US4187191(A)

申请号：US19780928094

申请日期：1978.07.26

申请公布日期：1980.02.05

申请人：

GENERAL MOTORS CORP

发明人：SIMPSON, GEORGE W JR

分类号：G03F7/42;(IPC1-7):C23G5/02;B08B3/08

主分类号：G03F7/42

摘要：A stripper for removing a photoresist mask. The stripper consists essentially, by volume, of about 50-85% tetrachloroethylene and ortho-dichlorobenzene in generally equal amounts, about 15-50% dodecylsulfonic acid, and up to 3% formic acid.

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