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MANUFACTURE OF SEMICONDUCTOR DEVICE

申请公布号:JPS54108573(A)

申请号:JP19780015347

申请日期:1978.02.15

申请公布日期:1979.08.25

申请人:
TOKYO SHIBAURA ELECTRIC CO

发明人:NAKAMURA HATSUO

分类号:H01L29/73;H01L21/22;H01L21/331;H01L29/72

主分类号:H01L29/73

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