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HEATINGGUP METHOD OF SEMICONDUCTOR SUBSTRATE

申请公布号:JPS5483373(A)

申请号:JP19770150581

申请日期:1977.12.16

申请公布日期:1979.07.03

申请人:
FUJITSU LTD

发明人:SAKURAI TERUO;HIYAMIZU SUKEHISA;OKAMURA SHIGERU;NISHI HIROSHI

分类号:H01L21/205;H01L21/20;H01L21/22;H01L21/265;H01L21/324

主分类号:H01L21/205

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