Novel integrated circuit and method of manufacturing same
申请公布号:US4069493(A)
申请号:US19760680572
申请日期:1976.04.26
申请公布日期:1978.01.17
发明人:BOBENRIETH, ALBERT
分类号:H01L21/266;H01L21/76;H01L27/00;H01L27/07;H01L27/12;H01L29/808;(IPC1-7):H01L29/80;H01L29/48;H01L27/02;H01L29/78
主分类号:H01L21/266
摘要:An integrated circuit comprises a high-resistivity substrate 1 which virtually insulates the various integrated components of the circuit from one another and reduces the parasitic capacitances. This components are constituted by ion implantation through high-precision masks, without exceeding 800 DEG C in temperature. This is the case with the source 3, the gate 9 and the drain 4, of the field-effect transistor (shown in FIG. 1).
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