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SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE

申请公布号:JPS5253677(A)

申请号:JP19750129209

申请日期:1975.10.29

申请公布日期:1977.04.30

申请人:
HITACHI LTD

发明人:SATOU TADANOBU

分类号:H01L29/73;H01L21/331;H01L27/04;H01L29/08

主分类号:H01L29/73

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