METHOD FOR DYNAMIC EXPERIMENTAL DESIGN,申请号US201414547731-传众专利搜索

METHOD FOR DYNAMIC EXPERIMENTAL DESIGN

申请公布号：US2016048628(A1)

申请号：US201414547731

申请日期：2014.11.19

申请公布日期：2016.02.18

申请人：

National Tsing Hua University

发明人：Chien Chen-Fu;Chuang Shih-Chung

分类号：G06F17/50

主分类号：G06F17/50

地址：Hsinchu City TW

摘要：The present invention discloses a method for dynamic experimental design that is applied in a semiconductor manufacturing process. During an experimental design process, it will be checked whether an experimental target range is changed so as to rebuild an experimental design table and retain completed experimental factors in order achieve the purpose of dynamically adjusting the experimental factors. The method for dynamic experimental design according to the present invention can be effectively applied in the high-tech industry.

主权项：1. A method for dynamic experimental design, comprising: defining an experimental target range, and obtaining at least one first factor, a plurality of first factor levels, and a plurality of experimental runs; building a first experimental design table according to the at least one first factor and the experimental runs; inputting the first factor levels to the first experimental design table; executing an experiment according to the first experimental design table; and checking whether the experimental target range is changed during the experiment; wherein if the experimental target range is changed during the experiment, at least one second factor and at least one second factor level are obtained, the at least one second factor is added into a second experimental design table, some of the first factor levels that have completed the experiment and the second factor levels are inputted into the second experimental design table, an experimental design continues, and the experimental target range is kept checked, or an experimental result and an analysis report are outputted.