MICRO ELECTROMECHANICAL SYSTEMS (MEMS) HAVING A GAP STOP AND METHOD THEREFOR

申请公布号：US2011133294(A1)

申请号：US20090632940

申请日期：2009.12.08

申请公布日期：2011.06.09

申请人：

PARK WOO TAE;KARLIN LISA H;LIU LIANJUN

发明人：PARK WOO TAE;KARLIN LISA H.;LIU LIANJUN

分类号：H01L29/84;H01L21/50

主分类号：H01L29/84

摘要：A method of forming a micro-electromechanical system (MEMS) includes providing a cap substrate, providing a support substrate, depositing a conductive material over the support substrate, patterning the conductive material to form a gap stop and a contact, wherein the gap stop is separated form the contact by an opening, forming a bonding material over the contact and in the opening, wherein the gap stop and the contact prevent the bonding material from extending outside the opening, and attaching the cap substrate to the support substrate by the step of forming the bonding material. In addition, the structure is described.

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