CLEANING SOLVENT AND CLEANING METHOD FOR METALLIC COMPOUND

申请公布号：EP2542709(A1)

申请号：EP20110750264

申请日期：2011.02.26

申请公布日期：2013.01.09

申请人：

L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE

发明人：SAKATA, YOICHI

分类号：C23C16/44;C11D7/50;H01L21/205;H01L21/304

主分类号：C23C16/44

摘要：<p>Disclosed are cleaning solvents and cleaning methods for metallic compounds deposited on the equipment that supplies organometallic compounds to the manufacturing tool in the photovoltaic industry or the semiconductor industry. The cleaning solvents and the cleaning methods disclosed not only selectively remove the metallic compound without corroding the equipment, but also improve the ordinary cleaning process. Moreover, the cleaning solvents and the cleaning methods disclosed improve maintenance costs for the supply system because the equipment may be cleaned without being detached from the supply system.</p>

Expansible probe for drainage of damp or saltpetre walls - consists of two hinged metal blades in electrical contact with the wall

Iodine-hydrophilic polymer addition products - for treatment of uterine infections, esp. in cows

Folding box for fragile objects - has lid flanged at edge and notched for latching onto box body to hold objects down

Crane hook safety device - has two moving jaws shutting off hook opening and operated by sprung levers

Sail mounting for boat - has forward sails formed in sections and rotatable concentrically about mast at different radii

Aluminothermic butt welding of rectangular workpieces - in which three mould elements are easily adapted to suit workpiece size

Holder for cheque book or documents - consists of two rectangular pieces, joined on three sides, with holder strip mounted on inside of opening

DIACRYLATES D'HYDANTOINES ET LEURS APPLICATIONS COMME MATIERES RESINEUSES

COMPOSITION COMPRENANT UN COPOLYMERE RADIAL TELESEQUENCE ET UN COPOLYMERE D'UN COMPOSE AROMATIQUE VINYLIQUE ET D'UN ANHYDRIDE CYCLIQUE

SYSTEME CALCULATEUR

PROCEDE ET DISPOSITIF DE COMMANDE D'UN JEU DE PISTONS DE PRESSE

ACCELERATEUR NON EFFLORESCENT DE LA VULCANISATION DE TERPOLYMERES ELASTOMERES, ET SON APPLICATION

NOUVEAUX COMPOSES TRIAZOLIQUES, LEUR PROCEDE DE PREPARATION ET LEURS APPLICATIONS AU TRAITEMENT DE PLANTES

NOUVEAUX DERIVES D'ACIDE HYDROXAMIQUE ET MEDICAMENTS EN CONTENANT

PERFECTIONNEMENTS APPORTES AUX OUTILLAGES POUR MANIPULER, SUR UN FOND SOUS-MARIN, DES DISPOSITIFS TELS QUE DES JOINTS ELASTIQUES, NOTAMMENT POUR COLONNES ARTICULEES

PROCEDE ET DISPOSITIF POUR EVITER L'USAGE ABUSIF DE VEHICULES, BATEAUX ET AUTRES EQUIPEMENTS MUS PAR DES MOTEURS A COMBUSTION INTERNE

COMPOSANT A SEMI-CONDUCTEURS

DISPOSITIF DE COMMANDE POUR MECANISME A COMBINAISONS DE PORTE DE COFFRE-FORT, ARMOIRE FORTE OU ANALOGUE

MACHINE DE CABLAGE ET DE GUIPAGE

DISPOSITIF DE COMMANDE DU FONCTIONNEMENT DE HAUT-PARLEURS PAR DES SIGNAUX VOCAUX