COMPOSITION AND METHOD TO POLISH SILICON NITRIDE,申请号SG20110017944-传众专利搜索

COMPOSITION AND METHOD TO POLISH SILICON NITRIDE

申请公布号：SG170108(A1)

申请号：SG20110017944

申请日期：2007.03.06

申请公布日期：2011.04.29

申请人：

CABOT MICROELECTRONICS CORPORATION

发明人：CHEN, ZHAN;VACASSY, ROBERT;CARTER, PHILLIP;DYSARD, JEFFREY

摘要：The inventive chemical-mechanical polishing composition comprises, and has a pH of 1 to 6. The inventive method of polishing a substrate involves the use of the aforesaid polishing composition and is particularly useful in polishing a substrate containing silicon nitride, (a) an abrasive, (b) 0.1 mM to 10 mM malonic acid, (c) 0.1 mM to 100mM of an aminocarboxylic acid, (d) 0.1 mM to 100mM sulfate ion, and (e) water. No suitable figure

COATED BODY FOR ELECTRONIC COMPONENT MEMBER HAVING EXCELLENT HEAT RADIATION

SEPARATING APPARATUS FOR CONTENT CONTAINED IN FLUID

METHOD OF BACKWASHING HOLLOW FIBER MEMBRANE AND WATER TREATMENT APPARATUS USING HOLLOW FIBER MEMBRANE

WELDING TORCH

COLLOIDAL MINERAL POWDER MODIFIED TO BE WATER-SOLUBLE AND OIL-SOLUBLE, METHOD OF PRODUCING THE SAME, AND PRODUCTION DEVICE THEREFOR

CATALYST FOR MANUFACTURING HYDROGEN, MANUFACTURING METHOD THEREOF AND HYDROGEN MANUFACTURING METHOD

ROLL SCREEN AND METHOD OF OPERATING THE SAME, AND MOVING TYPE GENERATED SOIL STABILIZATION TREATMENT EQUIPMENT HAVING THE SAME MOUNTED THEREON

INSPECTION APPARATUS

TEMPERATURE ADJUSTING ROLLER DEVICE AND TEMPERATURE REGULATING METHOD FOR METAL WEB

GARBAGE DISPOSER

HONEYCOMB FILTER AND ITS PRODUCTION METHOD

MOVING BED TYPE FILTER EQUIPMENT