DIFFUSION BARRIER LAYER AND SEMICONDUCTOR DEVICE CONTAINING SAME
申请公布号:SG101955(A1)
申请号:SG20010000551
申请日期:2001.02.03
申请公布日期:2004.02.27
发明人:STEPHAN ALAN COHEN;TIMOTHY JOSEPH DALTON;JOHN ANTHONY FITZSIMMONS;STEPHEN MCCONNELL GATES;LYNNE M GIGNAC;PAUL CHARLES JAMISON;KANG-WOOK LEE;SAMPATH PURUSHOTHAMAN;DARRYL D RESTAINO;EVA SIMONYI;HORATIO SEYMOUR WILDMAN
分类号:H01L21/28;H01L21/31;H01L21/316;H01L21/318;H01L21/768;H01L23/522;H01L23/532;(IPC1-7):H01L21/285;H01L23/48;H01L21/321;H01L21/320;H01L21/314
主分类号:H01L21/28
摘要:A semiconductor device containing a diffusion barrier layer is provided. The semiconductor device includes at least a semiconductor substrate containing conductive metal elements; and, a diffusion barrier layer applied to at least a portion of the substrate in contact with the conductive metal elements, the diffusion barrier layer having an upper surface and a lower surface and a central portion, and being formed from silicon, carbon, nitrogen and hydrogen with the nitrogen being non-uniformly distributed throughout the diffusion barrier layer. Thus, the nitrogen is more concentrated near the lower and upper surfaces of the diffusion barrier layer as compared to the central portion of the diffusion barrier layer. Methods for making the semiconductor devices are also provided.
DRIVING STATE MONITORING DEVICE
LIFTING DEVICE OF VEHICLE SEAT
METHOD AND APPARATUS FOR ASSISTING USER IN SELECTING PROGRAM FOR VIEWING OR LISTENING
CALL CENTER SYSTEM AND CALL CONTROL METHOD
LASER TYPE GAS ANALYZER AND CONCENTRATION MEASURING METHOD OF OXYGEN GAS
METHOD FOR REDUCING ODOR IN PERSONAL CARE PRODUCT
WASHING DEVICE OF LIGHTING FIXTURE FOR VEHICLE
DRIVE SUPPORT DEVICE, DRIVE SUPPORT METHOD, AND DRIVE SUPPORT PROGRAM
ELECTRONIC DEVICE AND MANUFACTURING METHOD THEREFOR
DIVISION TYPE MOVABLE IMAGE DISPLAY, GAME BOARD AND PACHINKO GAME MACHINE
BARIUM TITANATE FINE PARTICLE AND ITS MANUFACTURING METHOD
VARIABLE CYLINDER CONTROLLER OF INTERNAL-COMBUSTION ENGINE
ELECTROSTATIC SEPARATION DEVICE
PARTIAL DISCHARGE CLASS DISCRIMINATION APPARATUS AND METHOD OF OIL INSULATION DEVICE