Layered structure of wire, a manufacturing method therefor, and an optical apparatus,申请号US20030383058-传众专利搜索

Layered structure of wire, a manufacturing method therefor, and an optical apparatus

申请公布号：US2003168968(A1)

申请号：US20030383058

申请日期：2003.03.07

申请公布日期：2003.09.11

申请人：

SANYO ELECTRIC CO., LTD.

发明人：SOTANI NAOYA;SUZUKI KOJI;MIYAI YOSHIO

分类号：H01B1/02;H01L21/285;H01L21/3205;H01L23/532;H01L27/12;H01L27/32;(IPC1-7):H05B33/00

主分类号：H01B1/02

摘要：A layered structure of wire(s) comprising a wiring layer made of a low resistance metal containing aluminum, copper or silver; and an alloy layer made of an intermediate phase containing the low resistance metal and a refractory metal. The refractory metal is molybdenum. There is also formed a layered structure of wire(s) made of an aluminum alloy containing a lanthanoid, wherein a number average crystal grain size is 16.9 nm or more. Crystal grain size may be larger than a mean free path of electrons to provide a layered structure of wire(s) with a reduced resistance.