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Vorrichtung und Verfahren zur Entfernung von kondensierbarem Aluminiumdampf aus einem Aluminiumätzungs-Abstrom

申请公布号:DE10195037(T1)

申请号:DE2001195037T

申请日期:2001.01.19

申请公布日期:2002.12.12

申请人:
MKS INSTRUMENTS INC., ANDOVER

发明人:GU, YOUFAN

分类号:B01D53/68;B01D5/00;B01D8/00;B01D53/46;C23C16/44;H01L21/31;(IPC1-7):B01D8/00

主分类号:B01D53/68

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