Vorrichtung und Verfahren zur Entfernung von kondensierbarem Aluminiumdampf aus einem Aluminiumätzungs-Abstrom
申请公布号:DE10195037(T1)
申请号:DE2001195037T
申请日期:2001.01.19
申请公布日期:2002.12.12
发明人:GU, YOUFAN
分类号:B01D53/68;B01D5/00;B01D8/00;B01D53/46;C23C16/44;H01L21/31;(IPC1-7):B01D8/00
主分类号:B01D53/68
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