METHOD FOR CORRECTING ALIGNMENT, PRODUCTION OF SEMICONDUCTOR DEVICE, DEVICE FOR CORRECTING ALIGNMENT AND SEMICONDUCTOR DEVICE,申请号JP19980251234-传众专利搜索

METHOD FOR CORRECTING ALIGNMENT, PRODUCTION OF SEMICONDUCTOR DEVICE, DEVICE FOR CORRECTING ALIGNMENT AND SEMICONDUCTOR DEVICE

申请公布号：JP2000081712(A)

申请号：JP19980251234

申请日期：1998.09.04

申请公布日期：2000.03.21

申请人：

MITSUBISHI ELECTRIC CORP

发明人：YASUDA TSUNEO;TOMIMATSU YOSHIKATSU

分类号：H01L21/027;G03F7/20;G03F9/00;(IPC1-7):G03F9/00

主分类号：H01L21/027

摘要：PROBLEM TO BE SOLVED: To correct an alignment with high alignment precision. SOLUTION: The mean value of past true deviations (true deviations of data numbers i=1 to 4) is calculated. The difference VA1 between the last true deviation (data number i=1) and the before-last true deviation (data number i=2) is calculated. The difference VA1 is multiplied by a constant and the resultant value VA2 is added to the mean value to calculate an expected stepper correcting value Pr1. A stepper setting value is determined on the basis of the correcting value Pr1.