Scanning force microscope with removable probe illuminator assembly

申请公布号：US5874669(A)

申请号：US19970951365

申请日期：1997.10.16

申请公布日期：1999.02.23

申请人：

RAYMAX TECHNOLOGY, INC.

发明人：RAY, DAVID J.

分类号：G01B5/28;G01B7/34;G01B21/30;G01Q20/02;G01Q70/02;(IPC1-7):G01B5/28

主分类号：G01B5/28

摘要：A scanning force microscope employs a laser (76) which creates a laser beam (26). The laser and a probe assembly (24) are mounted in a removable probe illuminator assembly (22). The removable probe illumination assembly is mounted to the moving portion of a scanning mechanism. The scanning mechanism creates relative movement between the probe illuminator assembly and a sample (28). The removal of the probe illuminator assembly permits alignment of said laser beam onto a cantilever (30) after removal of said illuminator assembly from the microscope. This prevents damage to, and shortens alignment time of, the microscope during replacement and alignment of the probe assembly.

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