NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE AND MANUFACTURE THEREOF
申请公布号:JPH10229137(A)
申请号:JP19970029927
申请日期:1997.02.14
申请公布日期:1998.08.25
发明人:NISHIBASHI KAZUYOSHI
分类号:H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/824
主分类号:H01L21/8247