WAVEGUIDE TYPE OPTICAL PHASE PLATE
申请公布号:JPS63147114(A)
申请号:JP19860295227
申请日期:1986.12.11
申请公布日期:1988.06.20
发明人:KAWACHI MASAO;JINGUJI KANAME;TAKATO NORIO
分类号:G02B6/00;G02B6/12;G02B6/122;G02B6/14
主分类号:G02B6/00
摘要:PURPOSE:To effectively obtain the functions of a birefringent crystal plate by forming a stress releasing groove in part of a clad layer to specific length along a core part so that the birefringence main axis direction of an optical waveguide is perpendicular to a substrate surface or slants from the horizontal direction. CONSTITUTION:A quartz-based glass single mode optical waveguide core part 22 is provided to a silicon substrate 21 and the stress releasing groove 31 is formed in a clad layer 23 on one side of the core part 22 along the core part. Therefore, part of stress operating on the optical waveguide from the silicon substrate 21 is released by groove 31, so right-left symmetry about the core part 22 is lost and the birefringence main axes 34a and 34b slant by an angle thetaas compared with there is not the stress releasing groove 31. Consequently, the optical waveguide provided with the stress releasing groove 31 on one side serves equally as a birefringent crystal plate.
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