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IMPROVEMENTS IN OR RELATING TO RADIATION SENSITIVE DEVICES
申请公布号：WO8703706(A2)
申请号：WO1986GB00743
申请日期：1986.12.05
申请公布日期：1987.06.18
发明人：COOPER, GRAHAM, PHILIP
分类号：G03C1/72;G03C1/00;G03F7/00;G03F7/022;G03F7/023;G03F7/027;G03F7/038;G03F7/095;G03F7/115;G03F7/26
主分类号：G03C1/72
摘要：Un dispositif sensible aux radiations, comprenant un substrat présentant une couche sensible aux radiations, est recouvert d'une couche de couverture discontinue qui est plus sensible à la lumière que la couche sensible aux radiations. La couche de couverture est formée par pulvérisation et permet d'améliorer le soutirage sous vide pendant l'exposition du dispositif à une image, sans affecter négativement l'exposition et les caractéristiques de développement du dispositif.
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